R-EL Glide
High Throughput EL microLED Wafer Inspection
High speed, high accuracy, non-damaging, full wafer EL inspection
Highest Speed▪ 6 Million LEDs/hour (standard configuration)
▪ Long probe card life-span
▪ High repeatability and accuracy)
Key Measurements▪ Go/No Go (Pass/Fail) electro-optical functionality
▪ Detect wavelength
▪ Detect intensity
▪ Detect luminance (upgrade)
▪ Electrical information per device: IV, Vf, Ir
Key Features▪ Vertical & flip-chip
▪ Wafer size: 4″-12″
▪ Non-damaging contact testing, with patented contact probe technology
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