R-EL
High-throughput EL microLED Wafer Inspection
High speed, high accuracy, full wafer EL inspection
- Speed
▪ 6 Million LEDs/hour (launching 2023)
- Measurements
▪ Identify dead chips
▪ Intensity
▪ Wavelength - Key Features
▪ Vertical & flip-chip
▪ Non-damaging
▪ High accuracy
▪ All microLED applications - Technology
▪ Proprietary technology allows for non-damaging microLED contact
▪ Hardware & software protocols to record wafer bow and changes in height across the wafer
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