R-EL Glide
High Throughput EL microLED Wafer Inspection
High speed, high accuracy, non-damaging, full wafer EL inspection
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- Highest Speed
▪ 6 Million LEDs/hour (standard configuration)
▪ Long probe card life-span
▪ High repeatability and accuracy) - Key Measurements
▪ Go/No Go (Pass/Fail) electro-optical functionality
▪ Detect wavelength
▪ Detect intensity
▪ Detect luminance (upgrade)
▪ Electrical information per device: IV, Vf, Ir - Key Features
▪ Vertical & flip-chip
▪ Wafer size: 4"-12"
▪ Non-damaging contact testing, with patented contact probe technology
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